The common measurement principles of pressure sensors include piezoresistive, piezoelectric, capacitive, electromagnetic and other common forms. Today I will explain to you the measurement method of the most commonly used resistive pressure sensor.
Piezoresistive pressure sensors are mainly based on the piezoresistive effect. The piezoresistive effect is used to describe the change in resistance of a material under mechanical stress. Unlike the piezoelectric effect, the piezoresistive effect only produces impedance changes and does not generate an electric charge. Most metallic and semiconductor materials have been found to have piezoresistive effects. Among them, the piezoresistive effect in semiconductor materials is much greater than that of metals. In 1954, C.S. Smith studied the piezoresistive effect of silicon in detail, and began to manufacture pressure sensors from silicon.
Piezoresistive pressure sensors are typically threaded into a Wheatstone bridge. Usually the sensitive core has no applied pressure, the bridge is in a balanced state (called the zero position), when the piezoresistive pressure sensor changes after the chip resistance changes, the bridge will be out of balance. If a constant current or voltage supply is added to the bridge, the bridge will output a voltage signal corresponding to the pressure, so that the resistance change of the piezoresistive pressure sensor is converted into a pressure signal output through the bridge. The bridge detects the change of resistance value, amplifies, and then converts the voltage and current into the corresponding current signal, which is compensated by the nonlinear correction loop, that is, the standard output signal with a linear correspondence of the input voltage is generated.
In order to reduce the influence of temperature changes on the resistance value of the core and improve the measurement accuracy, the piezoresistive pressure sensor also uses a laser resistance adjustment process to compensate for zero point and sensitivity temperature over a wide temperature range. At present, piezoresistive pressure sensors are widely used in aerospace, aviation, navigation, petrochemical, power machinery, biomedical engineering, meteorology, geology, seismic measurement and other fields.
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